Electric Linear Slide EZS Series for Clean Room Use Product Line

Please purchase electric cylinders, drivers and connection cables separately.

Electric Cylinders

Straight Type
Standard
Straight Type
With Shaft Guide
Straight Type
With Shaft Guide Cover
Reversed Motor Type
Standard
Reversed Motor Type
With Shaft Guide
Reversed Motor Type
With Shaft Guide Cover

Type	Linear Slide Width × Height [mm]	Model	Maximum Transportable Mass [kg]	Stroke [mm]	Power Supply Input [V]
	54 × 50	EZSM3	Horizontal 15/Vertical 7	50 to 700 (50 mm increments)	Single-Phase 100-120 Single-Phase/Three-Phase 200-240 DC24/48
	74 × 50	EZSM4	Horizontal 30/Vertical 14	50 to 700 (50 mm increments)
	74 × 66.5	EZSM6	Horizontal 60/Vertical 30	50 to 850 (50 mm increments)

Driver

	Driver Type	Power Supply Input [V]
	Built-In Controller	Single-Phase 100-120 VAC single-phase/three-phase 200-240 VAC 24/48 VDC^*
	Pulse Input With RS-485 Communication
	Pulse Input
	EtherCAT Compatible
	EtherNet/IP Compatible
	PROFINET Compatible
	MECHATROLINK-III Compatible	Single-Phase 100-120 VAC Single-Phase/Three-Phase 200-240 VAC
	SSCNET III/H Compatible

*EACM2 is 24 VDC only

Connection Cable/Flexible Connection Cable

The motor cable, encoder cable and electromagnetic brake cable from the motor cannot be connected directly to the driver.
Use flexible connection cables for applications where cables are bent.

	Length [m]
	0.5~20